Waferpedia

Tool family

SUSS MicroTec GT200

The SUSS MicroTec GT200 is an eco-friendly wafer cleaning system that achieves efficient cleaning with stable processes, lower chemical consumption, and no hazardous acids or organic solvents.

Models in this family

  1. The SUSS MicroTec GT200 is an eco-friendly wafer cleaning system that achieves efficient cleaning with stable processes, lower chemical consumption, and no hazardous acids or organic solvents.