Waferpedia

Tool family

SUSS MicroTec DSC300 Gen2

SUSS MicroTecLithography1 entry

The SUSS MicroTec DSC300 Gen2 is an automated full-field scanning projection lithography system for wafers up to 300 mm.

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Models in this family

  1. DSC300 Gen2Gen2

    The SUSS MicroTec DSC300 Gen2 is an automated full-field scanning projection lithography system for wafers up to 300 mm.