Tool family

SUSS MicroTec ACS 200 Spin

Models in this family

ACS 200 Spin
The SUSS MicroTec ACS 200 Spin is an automated photoresist coating and baking station with cassette-to-cassette substrate operation.
Cited variants
Designation Generation Vintage Changes Source
ACS200 Gen3 — — Newest generation of ACS200 as of 2016, four units installed in Russia doi.org^[1]

Designation	Generation	Vintage	Changes	Source
ACS200 Gen3	—	—	Newest generation of ACS200 as of 2016, four units installed in Russia	doi.org^[1]

Sources (1)Every fact above is drawn from these public sources