Waferpedia

Tool family

Sumitomo SEN

SumitomoIon Implantation2 entries
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Models in this family

  1. SEN NV GSD HE Ion

    The Sumitomo SEN NV GSD HE Ion Implanter is an ion implantation tool.

  2. SEN NV GSD III 180 High Current Ion

    The Sumitomo / SEN NV GSD III 180 is a high current ion implanter stated to be for 6-inch wafers.

All entries

  1. SEN NV GSD HE IonSumitomo

    The Sumitomo SEN NV GSD HE Ion Implanter is an ion implantation tool.

    CategoryIon Implantation
    15 specs
  2. SEN NV GSD III 180 High Current IonSumitomo

    The Sumitomo / SEN NV GSD III 180 is a high current ion implanter stated to be for 6-inch wafers.

    CategoryIon Implantation
    4 specs