Tool family
The Semitool SST 201 SRD is a spin rinse dryer designed for 8-inch wafers with a single chamber configuration.
The Semitool SST C 642 250 is a batch wafer processing system specified for 8-inch wafers.
Semitool SST C 742 280 Spray Solvent System with SMIF loader, carrier loader, DIW pump, chemical supply unit, CTR unit, base plate, and cabinets.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| SST-C-742-280-PB | — | 1995 | Described as WET; site size 150mm (6 inch); serial number F59353. | ptwsingapore.com[1] |
The Semitool SST 201 SRD is a spin rinse dryer designed for 8-inch wafers with a single chamber configuration.
The Semitool SST C 642 250 is a batch wafer processing system specified for 8-inch wafers.
Semitool SST C 742 280 Spray Solvent System with SMIF loader, carrier loader, DIW pump, chemical supply unit, CTR unit, base plate, and cabinets.