Tool family
The Plasma-Therm 210RL-A is a dry etch tool listed as RIE-PlasmaTherm-210RL-A in the equipment rates documents.
The Plasma-Therm 210RL-A is a reactive-ion etch (RIE) system designed for semiconductor and microelectromechanical systems (MEMS) fabrication, belonging to the class of plasma-based dry etching equipment.