Tool family
ASML TWINSCAN NXE:3400C
The TWINSCAN NXE:3400C is an EUV lithography system by ASML that supports volume production at the 7 and 5 nm logic nodes.
Models in this family
The TWINSCAN NXE:3400C is an EUV lithography system by ASML that supports volume production at the 7 and 5 nm logic nodes.
