YES
310TA
The YES 310TA is a vacuum cure and HMDS vapor prime oven for enhancing photoresist adhesion. The YES 310TA operates at 150°C with a 300-second HMDS vapor exposure. The YES 310TA treats wafers up to 6 inches in diameter.[1][2]
What it is
How it works
Where it fits in the process flow
The YES 310TA sits before photoresist spin coating as a priming step that improves adhesion.[1][3]
The YES 310TA is used for batch processing of wafers in cassettes and is followed by cooling before spin coating.[1]
Applications
The YES 310TA primes silicon, silicon dioxide, and silicon nitride with silane molecules to improve adhesion of polymers such as photoresists.[1]
- Batch priming of Si, native or film SiO2, and Si3N4
- Enhancing adhesion of polymers such as photoresists
- HMDS treatment before spin coating
What do the numbers mean?
Vacuum & pumping2
Wafer handling8
Optics & imaging2
Configuration & options11
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| YES-310TA | — | — | — | web.archive.org[3] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What surface treatment does the YES 310TA perform?
The YES 310TA performs HMDS vapor priming.[1]
Which materials can the YES 310TA prime?
The YES 310TA can batch prime silicon, silicon dioxide, and silicon nitride.[1]
How long does one HMDS prime cycle take?
The YES 310TA uses an exposure time of three hundred seconds and a total process time of about fifteen minutes.[1]
Not publicly documented
The following facts about the 310TA are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 310TA are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 310TA are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 310TA are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 310TA is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 310TA are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]epfl.ch — epfl.chepfl.ch
- [2]colorado.edu — colorado.educolorado.edu
- [3]web.archive.org — web.archive.orgweb.archive.org
- [4]Capabilities | UD Nanofabrication Facility — udnf.udel.eduudnf.udel.edu
Last updated Oct 5, 2026.
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