YES
The MKS Type 253B Exhaust Throttle Valve is a butterfly valve. The MKS Type 253B Exhaust Throttle Valve regulates gas removal from a vacuum chamber when used with an MKS controller. The MKS Type 253B Exhaust Throttle Valve is available with CF, KF Style ISO, NW Style ISO, ASA, and JIS flange types.[1]
Process applications and technology nodes documented for this tool.
Documented failure modes, common issues, and field considerations.
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 253B-2-2-1 | — | — | ASA flange variant with 1.88 in inside diameter, ASA 2 in mounting flange, and Viton flapper seal. | nanofab.utah.edu[1] |
| 253B-2-2-2 | — | — | ASA flange variant with 1.950 in inside diameter, ASA 2 in mounting flange, and no flapper seal. | nanofab.utah.edu[1] |
| 253B-60-2-1 | — | — | ASA flange variant with 2.362 in inside diameter, ASA 2 in mounting flange, and Viton flapper seal. | nanofab.utah.edu[1] |
| 253B-60-2-2 | — | — | ASA flange variant with 2.362 in inside diameter, ASA 2 in mounting flange, and no flapper seal. | nanofab.utah.edu[1] |
| 253B-3-2-2 | — | — | ASA flange variant with 3.025 in inside diameter, ASA 2 in mounting flange, and no flapper seal. | nanofab.utah.edu[1] |
| 253B-3-3-2 | — | — | ASA flange variant with 3.025 in inside diameter, ASA 3 in mounting flange, and no flapper seal. | nanofab.utah.edu[1] |
| 253B-4-3-2 | — | — | ASA flange variant with 3.965 in inside diameter, ASA 3 in mounting flange, and no flapper seal. | nanofab.utah.edu[1] |
| 253B-20-40-1 | — | — | KF-40 variant with 0.779 in inside diameter, 2.75 in outside diameter unheated, 3.00 in with heater option, and Viton flapper seal. | nanofab.utah.edu[1] |
| 253B-20-40-2 | — | — | KF-40 variant with 0.779 in inside diameter, 2.75 in outside diameter unheated, 3.00 in with heater option, and no flapper seal. | nanofab.utah.edu[1] |
| 253B-1-40-1 | — | — | KF-40 variant with 1.270 in inside diameter, 2.75 in outside diameter unheated, 3.00 in with heater option, and Viton flapper seal. | nanofab.utah.edu[1] |
| 253B-1-40-2 | — | — | KF-40 variant with 1.270 in inside diameter, 2.75 in outside diameter unheated, 3.00 in with heater option, and no flapper seal. | nanofab.utah.edu[1] |
| 253B-2-50-1 | — | — | KF-50 variant with 1.888 in inside diameter, 3.25 in outside diameter unheated, 3.50 in with heater option, and Viton flapper seal. | nanofab.utah.edu[1] |
| 253B-2-50-2 | — | — | KF-50 variant with 2.000 in inside diameter, 3.25 in outside diameter unheated, 3.50 in with heater option, and no flapper seal. | nanofab.utah.edu[1] |
| 253B-60-63-1 | — | — | NW-63 variant with 2.362 in inside diameter, NW-63 mounting flange, 5.95 in outside diameter, and Viton flapper seal. | nanofab.utah.edu[1] |
| 253B-60-63-2 | — | — | NW-63 variant with 2.362 in inside diameter, NW-63 mounting flange, 5.95 in outside diameter, and no flapper seal. | nanofab.utah.edu[1] |
| 253B-3-80-2 | — | — | NW-80 variant with 3.000 in inside diameter, NW-80 mounting flange, 5.95 in outside diameter, and no flapper seal. | nanofab.utah.edu[1] |
| 253B-20-2CF-1 | — | — | 2¾ in CF variant with 0.779 in inside diameter, 2.75 in outside diameter, and Viton flapper seal. | nanofab.utah.edu[1] |
| 253B-20-2CF-2 | — | — | 2¾ in CF variant with 0.779 in inside diameter, 2.75 in outside diameter, and no flapper seal. | nanofab.utah.edu[1] |
| 253B-1-2CF-1 | — | — | 2¾ in CF variant with 1.270 in inside diameter, 2.75 in outside diameter, and Viton flapper seal. | nanofab.utah.edu[1] |
| 253B-1-2CF-2 | — | — | 2¾ in CF variant with 1.270 in inside diameter, 2.75 in outside diameter, and no flapper seal. | nanofab.utah.edu[1] |
| 253B-2-3CF-1 | — | — | 3⅜ in CF variant with 1.888 in inside diameter, 3.25 in outside diameter, and Viton flapper seal. | nanofab.utah.edu[1] |
| 253B-2-3CF-2 | — | — | 3⅜ in CF variant with 2.000 in inside diameter, 3.25 in outside diameter, and no flapper seal. | nanofab.utah.edu[1] |
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
No research found yet — worked with this tool? Share what you know.
The following facts about the 253B-20-2CF-2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 253B-20-2CF-2 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 253B-20-2CF-2 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 253B-20-2CF-2 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 253B-20-2CF-2 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the 253B-20-2CF-2 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Last updated Oct 9, 2026.