Veeco
4-point
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Veeco 4-point probe is a metrology tool for measuring sheet resistance and resistivity of semiconductor wafers and thin films. The Veeco 4-point probe can accept wafers up to 6 inches in diameter.[1][2]
What it is
How it works
The Veeco 4-point probe uses microprocessor-based electronics to directly compute voltage-to-current ratio, sheet or slice resistivity, metallization thickness, and P-N type.[2]
In contrast to most four-point probing stations, where the probe head moves into the wafer, the Veeco FPP-5000 design moves the wafer into the probe head.[2]
Applications
The Veeco 4-point probe measures sheet resistance and material resistivity of semiconductor wafers and resistive films.[1]
What do the numbers mean?
Wafer handling2
Configuration & options3
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What parameters can the VEECO FPP-5000 measure?
The VEECO FPP-5000 can measure V/I, sheet or slice resistivity, and metallization thickness, and perform P-N type testing.[2]
What is the maximum substrate size for the Veeco 4-point probe at ASU NanoFab?
The maximum substrate size is 6 inches.[1]
What is the design difference of the FPP-5000 compared to other four-point probes?
Unlike most four-point probes that move the probe head into the wafer, the FPP-5000 moves the wafer into the probe head, ensuring constant probe force independent of operator force and wafer thickness.[2]
Not publicly documented
The following facts about the 4-point are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 4-point are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 4-point are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 4-point are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 4-point are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 4-point is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]nnci.net — nnci.netnnci.net
- [2]nrf.aux.eng.ufl.edu — nrf.aux.eng.ufl.edunrf.aux.eng.ufl.edu
- [3]cores.research.asu.edu — cores.research.asu.educores.research.asu.edu
Last updated Oct 3, 2026.