Varian
M 2 i
What it is
The Varian M 2 i is a sputtering system.[1]
How it works
General reference — not yet source-verifiedA sputtering tool commonly uses vacuum hardware, gas delivery, pumping, and motion or transfer subsystems to maintain the deposition chamber and move substrates through the process.
Where it fits in the process flow
General reference — not yet source-verifiedThe Varian M 2 i belongs in the thin-film deposition portion of a semiconductor or precision-processing flow.
A sputtering system typically follows wafer preparation and precedes patterning or subsequent film-processing steps.
Applications
General reference — not yet source-verifiedSputtering systems are used to deposit thin films for electronic and microfabricated devices.
Sputtering is used for conductive, semiconductive, and insulating coatings when controlled film uniformity and composition are required.
What do the numbers mean?
Power & electrical2
- Power supply[1]
- Included components
- Alpha computer; load lock; turbo pump; Edwards dry pump; turbo controller; VME computer; orienter; hand off station; cryo pump; load arm; DCM servo controller; transfer servo controller; power supply; gas controller; ion gauge controller; compressor; chiller[1]
Vacuum & pumping4
Wafer handling3
Gas & chemistry1
- Gas controller[1]
Control & software4
Configuration & options7
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationTurbo pump[1]
- ConfigurationEdwards Dry pump[1]
- ConfigurationTurbo controller[1]
- ConfigurationCryo pump[1]
- ConfigurationPower supply[1]
- ConfigurationGas controller[1]
- Included componentsAlpha computer; load lock; turbo pump; Edwards dry pump; turbo controller; VME computer; orienter; hand off station; cryo pump; load arm; DCM servo controller; transfer servo controller; power supply; gas controller; ion gauge controller; compressor; chiller[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the Varian M 2 i?
The Varian M 2 i is a sputtering system.[1]
Not publicly documented
The following facts about the M 2 i are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the M 2 i are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the M 2 i are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the M 2 i are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the M 2 i are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the M 2 i is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Oct 11, 2026.
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