Tokyo Electron
Precio
The Precio series is a fully automatic wafer-probing platform from Tokyo Electron Limited. The Precio series provides XY accuracy, Z-axis control for soft contact, optimum temperature control during test, and increased parallel die testing.[1]
What it is
The Precio series is a fully automatic wafer-probing platform manufactured by Tokyo Electron.[1]
How it works
The Precio series achieves XY accuracy to realize reliable contacts and includes Z-axis control for soft contact.[1]
The Precio series provides optimum temperature control during test and supports increased parallel die testing.[1]
Some Precio configurations include a tri-temperature chuck, a nickel hot and cold chuck, or a single FOUP wafer loader with a GPIB tester interface and a chiller.[3][2]
Where it fits in the process flow
The Precio series is designed to be integrated with tester systems and networking software such as the PN-300 for data management and remote operation.[1]
Applications
The Precio series is used for wafer probing in the test process, addressing demands related to process miniaturization, higher device functionality, and package variety.[1]
The Precio series is employed in applications requiring precise XY and Z-axis control, temperature management, and high-speed probe mark inspection.[1]
What do the numbers mean?
Wafer handling9
- 12" Nickel Hot & Cold Chuck Unit[2]
Optics & imaging1
Performance4
Control & software2
- GPIB Tester Interface[2]
Dimensions & facilities1
Configuration & options7
Vintage & configurations
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
What is the XY probing accuracy of the Precio XL?
What is the Z probing accuracy of the Precio series?
The Z probing accuracy of the Precio series, including the Precio XL, is ±5.0 µm.[1]
Not publicly documented
The following facts about the Precio are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Precio are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Precio are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Precio are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Precio is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Precio are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]tel.com — tel.comtel.com
- [2]Inventory photo
- [3]Inventory photo
- [4]Precio XL - Tokyo Electron Limited | Wafer Probe System — semiconductor.directorysemiconductor.directory
- [5]TELPADS-O | Tokyo Electron — tel.com (Jan 14, 2011)web.archive.org
- [6]Tokyo Electron Tel Wave Test Equipment Precio octo — flason-smt.comflason-smt.com
Last updated Sep 24, 2026.
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