Waferpedia

Tokyo Electron

P 8

Test & ProbeTokyo Electron P 8 family
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P 8 — Inventory photo
Fig. 01P 8Inventory photo[1]

What it is

General reference — not yet source-verified

The P 8 belongs to the class of wafer probing equipment used to contact devices on a wafer for electrical test before later assembly or packaging steps.

How it works

General reference — not yet source-verified

A wafer prober positions a wafer so that probe contacts can touch specific pads or structures on the wafer surface. The probing stage and probe card or probe needles are aligned to the device under test, and the tool then supports electrical measurement or functional screening at wafer level.

The P 8 is a probe tool rather than a process tool that changes the wafer material. The tool serves as an interface between wafer-level test instrumentation and the devices on the wafer.

Where it fits in the process flow

General reference — not yet source-verified

The P 8 fits in the wafer test flow after front-end fabrication and before dicing, assembly, or final package test. The tool supports wafer-level screening so defective dies can be identified before downstream processing.

A probe step in this class typically precedes die singulation and packaging. The probing result guides device acceptance, yield analysis, and selection for later stages of manufacturing.

Applications

General reference — not yet source-verified

Wafer probing tools are used for device characterization, production screening, and test before assembly. The class is used across integrated circuit manufacturing where contact to on-wafer pads is required.

What do the numbers mean?

Wafer handling5

Gold chuck[2]
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Wafer Size
8 inch[7]
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Chuck Type
Gold chuck[2]
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Wafer Sizes
8 inch[7]
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Gold chuck; ambient temperature; clean pad; MVME/VIP Board[2]
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Control & software1

Temperature Control
Ambient Temperature[2]
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Configuration & options9

Ambient Temperature[2]
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Clean pad[2]
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MVME/VIP Board[2]
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Pad Type
Clean pad[2]
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Board Type
MVME/VIP Board[2]
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Vintage
1994, 1997[8]
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Make
Tel[7]
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Model
P 8[7]
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Product type
Prober[8]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

How is alignment maintained between probe tips and wafer pads?General reference — not yet source-verified

Alignment is achieved through a combination of mechanical stages, optical microscopes or cameras, and automated alignment routines. The system uses pattern recognition or manual adjustment to ensure probe tips contact the correct locations on the wafer.

What factors influence the throughput of such a probe system?General reference — not yet source-verified

Throughput is affected by the number of dies tested per cycle, the time required for each test, the stepping speed of the chuck, the number of probe contacts, and the need for periodic cleaning or calibration of the probe tips.

Can this class of machine handle wafers of different sizes?General reference — not yet source-verified

Probe stations of this class are typically designed to accommodate a specific wafer size or a limited range of sizes. The chuck, wafer handler, and alignment system must be configured for the intended wafer diameter.

What kind of maintenance is required for a probe station?General reference — not yet source-verified

Routine maintenance includes cleaning the probe tips to remove residue and prevent contamination, verifying planarity of the probe card, calibrating the positioning stages, and inspecting the chuck for flatness. Periodic replacement of probe cards and consumables may also be needed.

Not publicly documented

The following facts about the P 8 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the P 8 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the P 8 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the P 8 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the P 8 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the P 8 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (8)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]Inventory photo
  7. [7]Equipment inventory listing
  8. [8]Equipment inventory listing
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Last updated Oct 3, 2026.

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