Tokyo Electron
Formula Vertical
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
General reference — not yet source-verifiedA vertical furnace operates by placing wafers vertically on a quartz boat that is loaded into a heated quartz tube from below. The tube is surrounded by resistive heating elements divided into multiple zones to maintain a precisely controlled temperature profile across the wafer batch. Process gases are introduced at the top of the tube and flow downward over the wafers, while exhaust is removed from the bottom. The system can operate at atmospheric or reduced pressure, enabling low-pressure CVD (LPCVD) processes.
Applications
General reference — not yet source-verifiedVertical diffusion furnaces are used for a variety of thermal processes including thermal oxidation, low-pressure chemical vapor deposition of silicon nitride, polysilicon, and silicon dioxide, as well as dopant diffusion and annealing. The equipment can be configured for different chemistries depending on the desired film type.
What do the numbers mean?
Wafer handling2
Configuration & options5
- Available process types
- ALD HIGH K(H TYPE), DCS SiN, DCS/NH3/HF/F2, TEOS/HF/F2, DCS SiN(H TYPE), DCS SiN(M TYPE), H TYPE, Teos(H TYPE)[5]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| FORMULA VERTICAL FURNACE, ALD HIGH K(H TYPE) PROCESS | — | — | configured for ALD high-k (H type) process | fabsurplus.com[5] |
| FORMULA VERTICAL FURNACE, DCS SiN PROCESS | — | — | configured for DCS SiN (silicon nitride) process | fabsurplus.com[5] |
| FORMULA Vertical Furnace, DCS/NH3/HF/F2 | — | — | configured for DCS/NH3/HF/F2 chemistry | fabsurplus.com[4] |
| FORMULA VERTICAL FURNACE, TEOS/HF/F2 PROCESS | — | — | configured for TEOS/HF/F2 process | fabsurplus.com[5] |
| FORMULA VERTICAL FURNACE, DCS SiN(H TYPE) PROCESS | — | — | configured for DCS SiN (H type) process | fabsurplus.com[5] |
| FORMULA VERTICAL FURNACE, DCS SiN(M TYPE) PROCESS | — | — | configured for DCS SiN (M type) process | fabsurplus.com[5] |
| FORMULA VERTICAL FURNACE, H TYPE PROCESS | — | — | configured for H type process | fabsurplus.com[5] |
| FORMULA VERTICAL FURNACE, Teos(H TYPE) PROCESS | — | — | configured for Teos (H type) process | fabsurplus.com[5] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
Not publicly documented
The following facts about the Formula Vertical are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Formula Vertical are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Formula Vertical are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Formula Vertical are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Formula Vertical is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Formula Vertical are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]fabsurplus.com — fabsurplus.comfabsurplus.com
- [4]fabsurplus.com — fabsurplus.comfabsurplus.com
- [5]fabsurplus.com — fabsurplus.comfabsurplus.com
- [6]TEL TOKYO ELECTRON FORMULA VERTICAL FURNACE ,DCS SiN PROCESS for sale — fabsurplus.comfabsurplus.com
Last updated Oct 2, 2026.
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