Waferpedia

Thermawave

Opti-Probe 2600

Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Thermawave Opti-Probe 2600 is a thin film measurement system.[1]

ThermawaveOpti-Probe 2600
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What it is

The Thermawave Opti-Probe 2600 is a thin film measurement system.[1]

What do the numbers mean?

Power & electrical1

Laser
675nm thermoelectrically cooled diode laser[2]
Accurate?

Wafer handling1

Wafer Size Compatibility
4- to 8-inches[2]
Accurate?

Optics & imaging2

Spectrometry lamp
450 to 840 nm tungsten halogen lamp[2]
Accurate?
Resolution
150nm[2]
Accurate?

Configuration & options4

BPR range
thick dielectric films > 500A[2]
Accurate?
BPE range
thin dielectric films < 500A[2]
Accurate?
Product type
Thin Film Measurement System[1]
Accurate?
Version
200[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Optiprobe 2600B——Referenced as a film measurement system variant in the spare-parts source.metrologyequipmentservices.com[3]
2600B———metrologyequipmentservices.com[3]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Laser675nm thermoelectrically cooled diode laser[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What manufacturer produces the Opti-Probe 2600?

The Opti-Probe 2600 is manufactured by Therma-Wave.[1]

What type of system is the Opti-Probe 2600?

The Opti-Probe 2600 is a thin film measurement system.[1]

What is the model number of this Therma-Wave system?

The model is Opti-Probe 2600.[1]

Not publicly documented

The following facts about the Opti-Probe 2600 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Opti-Probe 2600 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Opti-Probe 2600 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Opti-Probe 2600 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Opti-Probe 2600 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Opti-Probe 2600 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]fabsurplus.com — fabsurplus.comfabsurplus.com
  2. [2]nanoxkorea.com — nanoxkorea.comnanoxkorea.com
  3. [3]metrologyequipmentservices.com — metrologyequipmentservices.commetrologyequipmentservices.com
  4. [4]Thermawave Optiprobe 2600 — evsemi.comevsemi.com
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Last updated Sep 27, 2026.

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