Waferpedia

Teradyne

ETS 600

Test & ProbeTeradyne ETS family
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ETS 600 — Inventory photo
Fig. 01ETS 600Inventory photo[1]
  • Plate 01Manipulator ETS-600/Test Head Handler

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What it is

The ETS 600 belongs to the Teradyne ETS family of test and probe equipment.[2]

How it works

A typical configuration of the ETS 600 includes an APU-12 board with 192 channels, an HPU board with 4 channels, an SPU-112 board with 24 channels, a DPU-16 board with 128 channels, a QMS board with 4 channels, a CBIT-64 board with 128 channels, a QTMU board with 8 channels, a DAAU board with 4 channels, an MCU-66MHz board with 16 channels, an ISOCOM 64 board with 128 channels, an SPU-112 BOOSTER board with 24 channels, an HCMUX board with 8 channels, and an MCU-CDB board with 16 channels.[1][2]

Where it fits in the process flow

General reference — not yet source-verified

The ETS 600 is used in the test stage of semiconductor manufacturing, after wafer fabrication and dicing, to verify that individual devices meet electrical specifications.

What do the numbers mean?

Power & electrical3

MCU-66MHz – Qty
1, CH: 16[1]
Accurate?
MCU-66MHz Quantity
1[1]
Accurate?
MCU-66MHz Channels
16[1]
Accurate?

Configuration & options37

Boards:[1]
Accurate?
APU-12 – Qty
16, CH: 192[1]
Accurate?
HPU – Qty
4, CH: 4[1]
Accurate?
SPU-112 – Qty
12, CH: 24[1]
Accurate?
DPU-16 – Qty
8, CH: 128[1]
Accurate?
QMS – Qty
1, CH: 4[1]
Accurate?
CBIT-64 – Qty
2, CH: 128[1]
Accurate?
QTMU – Qty
2, CH: 8[1]
Accurate?
DAAU – Qty
1, CH: 4[1]
Accurate?
ISOCOM 64 – Qty
4, CH: 128[1]
Accurate?
SPU-112 BOOSTER – Qty
6, CH: 24[1]
Accurate?
HCMUX – Qty
1, CH: 8[1]
Accurate?
MCU-CDB – Qty
1, CH: 16[1]
Accurate?
APU-12 Quantity
16[1]
Accurate?
APU-12 Channels
192[1]
Accurate?
HPU Quantity
4[1]
Accurate?
HPU Channels
4[1]
Accurate?
SPU-112 Quantity
12[1]
Accurate?
SPU-112 Channels
24[1]
Accurate?
DPU-16 Quantity
8[1]
Accurate?
DPU-16 Channels
128[1]
Accurate?
QMS Quantity
1[1]
Accurate?
QMS Channels
4[1]
Accurate?
CBIT-64 Quantity
2[1]
Accurate?
CBIT-64 Channels
128[1]
Accurate?
QTMU Quantity
2[1]
Accurate?
QTMU Channels
8[1]
Accurate?
DAAU Quantity
1[1]
Accurate?
DAAU Channels
4[1]
Accurate?
ISOCOM 64 Quantity
4[1]
Accurate?
ISOCOM 64 Channels
128[1]
Accurate?
SPU-112 BOOSTER Quantity
6[1]
Accurate?
SPU-112 BOOSTER Channels
24[1]
Accurate?
HCMUX Quantity
1[1]
Accurate?
HCMUX Channels
8[1]
Accurate?
MCU-CDB Quantity
1[1]
Accurate?
MCU-CDB Channels
16[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • MCU-66MHz – Qty1, CH: 16[1]
  • MCU-66MHz Quantity1[1]
  • MCU-66MHz Channels16[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the ETS 600 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ETS 600 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the ETS 600 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the ETS 600 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the ETS 600 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the ETS 600 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]ETS 600 — Teradyne | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 10, 2026.

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