Temescal

BJD 2000

Deposition Temescal BJD 2000 family

Research Quality: 30% complete

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BJD 2000 — Inventory photo — Fig. 01BJD 2000Inventory photo^[1]

Power

6 KW EBeam Power Supply^[1]

Vacuum

Roughing Pump^[1]

What is it?

The Airco / Temescal BJD 2000 is a batch-loading vacuum chamber evaporator with a 20-inch diameter hinged bell jar.

What do the numbers mean?

Power & electrical1

Power: 6 KW EBeam Power Supply^[1]

Vacuum & pumping2

Batch loading vacuum chamber w/ 20" diameter hinged bell jar^[1]

Accurate?

Roughing Pump^[1]

Accurate?

Control & software2

E-Beam Controller: Inficon Model XTC/3^[1]
Process Controller: CTI Model CT-8 Onboard^[1]

Configuration & options6

Bell jar can be installed and mounted in one of two orientations for approach and loading^[1]; Electric hoist actuation of source tray flange for easy maintenance^[1]
With: Two sets of removable shields for cleaning^[1]; Spare KF flange-port for RGA or alternate access^[1]; EBeam Gun STIH-270-2CK^[1]; Lift-Off Dome^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationBatch loading vacuum chamber w/ 20" diameter hinged bell jar^[1]
ConfigurationRoughing Pump^[1]
Power6 KW EBeam Power Supply^[1]

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the BJD 2000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the BJD 2000 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the BJD 2000 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the BJD 2000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the BJD 2000 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the BJD 2000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report