Waferpedia

SVG

88

Thermal / DiffusionSVG 88 family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The SVG 88 is a coater system. The SVG 88 supports 6-inch and 8-inch wafer sizes. The SVG 88 uses a single-track configuration with sender indexer, coat-bake-receiver indexer.[1]

SVG88
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What it is

The SVG 88 is a photoresist coating system used in semiconductor manufacturing to apply a uniform layer of photoresist onto wafers. The SVG 88 is a coater, not a developer or scrubber. The system supports 6-inch and 8-inch wafer sizes. The SVG 88 is configured as a single-track system with a sender indexer, a coat module, bake modules, and a receiver indexer (coat-bake-receiver indexer).[1][2]

What do the numbers mean?

Wafer handling5

Sender indexer
coat-bake-receiver indexer[1]
Accurate?
Wafer sizes
6 inch, 8 inch[1]
Accurate?
Included modules
Sender indexer, coat module, bake module, receiver indexer[1]
Accurate?
Substrate support
SiC, Sapphire, Quartz, Ge, GaAs, GaN[2]
Accurate?
Dual wafer size upgrade
Supported[2]
Accurate?

Configuration & options2

Single track[1]
Accurate?
Track configuration
Single track[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
SVG 88e———shellbacksemi.com[2]
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the 88 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 88 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the 88 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 88 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 88 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 88 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]shellbacksemi.com — shellbacksemi.comshellbacksemi.com
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Last updated Oct 10, 2026.

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