SMC
HRS 150 AF 20 S Chiller
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
General reference — not yet source-verifiedThe SMC HRS 150 AF 20 S Chiller is a process-cooling unit in the laboratory and support-equipment category.
How it works
General reference — not yet source-verifiedA chiller removes heat from a connected tool or process loop and returns temperature-controlled fluid to stabilize operation.
A chiller in this class normally uses a closed refrigeration circuit, a coolant circulation path, and temperature feedback control to hold the supplied fluid near a target condition.
Where it fits in the process flow
General reference — not yet source-verifiedA chiller sits outside the primary fabrication or test process and supports equipment that needs controlled thermal conditions during operation.
A chiller commonly serves upstream and downstream tool subsystems that generate heat, including temperature-sensitive stages, pumps, and other auxiliary hardware.
Applications
General reference — not yet source-verifiedA chiller of this type is used with semiconductor manufacturing and laboratory equipment that requires thermal control for stable operation.
A chiller is also used wherever a process tool needs continuous heat removal from circulating fluid rather than direct ambient cooling.
What do the numbers mean?
Power & electrical3
Configuration & options3
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is it?
The equipment is a chiller.[1]
Not publicly documented
The following facts about the HRS 150 AF 20 S Chiller are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the HRS 150 AF 20 S Chiller are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the HRS 150 AF 20 S Chiller are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the HRS 150 AF 20 S Chiller are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the HRS 150 AF 20 S Chiller are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the HRS 150 AF 20 S Chiller is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Oct 4, 2026.
Compare with similar tools
View all →
The Applied Materials 0010-13627 is a high efficiency RF match designed for semiconductor equipment.