Pfeiffer
TPU 510 Turbomolecular Vacuum
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Pfeiffer TPU 510 Turbomolecular Vacuum Pump is a turbomolecular pump. The Pfeiffer TPU 510 Turbomolecular Vacuum Pump has a DN 160 CF-F intake flange and a DN 40 KF fore-vacuum flange. The Pfeiffer TPU 510 Turbomolecular Vacuum Pump is specified with a nitrogen volume flow rate of 500 l/s and a weight of 30 kg.[1][2][3]
What it is
The TPU 510 model is available in multiple configurations, including a standard version and a corrosive-resistant variant designated TPU 510 C. The pump has a top-flange orientation for its inlet and features a DN 160 CF-F Conflat flange. The TPH 510 model is identical in design but uses a DN 160 ISO-K inlet flange.[1][2]
The TPU 510 uses two ceramic bearings to support the rotor and is lubricated with Pfeiffer TL 011 turbo pump fluid. The pump has a weight of 30 kilograms and can be operated with several compatible electronic controllers, including the TCP 300, TCP 310, and TCP 380.[1][2][3]
How it works
The pump requires a backing pump to operate, typically a rotary vane pump or dry pump, to reduce the foreline pressure to a level at which the turbomolecular pump can function effectively. The TPU 510 has a fore-vacuum flange size of DN 40 KF and recommends a backing pump with a pumping speed of 12 liters per second.[1][3]
What do the numbers mean?
Power & electrical1
Vacuum & pumping6
- Recommended backing pump
- 12 Acc electronic drive unit TCP 300 (TCP 300), TCP 310 (TCP 310), TCP 380[1]
Dimensions & facilities4
Configuration & options15
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| TPU 510 C | — | — | Plasma corrosive turbo pump version. | ajvs.com[3] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Does a turbomolecular pump require a backing pump?General reference — not yet source-verified
Yes, a turbomolecular pump must be used in series with a roughing (backing) pump. The turbomolecular pump cannot discharge directly to atmosphere; it requires a backing vacuum to properly exhaust gas. The backing pump reduces the initial chamber pressure and maintains the required foreline pressure.
What is the typical maintenance schedule for a turbomolecular pump?General reference — not yet source-verified
Maintenance intervals depend on the pump design and operating conditions. Generally, bearing units or magnetic bearings may need inspection or replacement after extended operation, and any oil-lubricated pumps require periodic oil changes. Many modern turbomolecular pumps have maintenance indicators or recommended service intervals specified by the manufacturer.
Can a turbomolecular pump handle corrosive or reactive gases?General reference — not yet source-verified
Standard turbomolecular pumps are designed for non-corrosive gases. For corrosive or reactive gases, specialized versions with corrosion-resistant materials and coatings are available. Appropriate gas compatibility should always be verified before use.
What is the orientation requirement for installing a turbomolecular pump?General reference — not yet source-verified
Many turbomolecular pumps can be installed in various orientations, including vertical, horizontal, or at an angle, depending on the bearing type and lubrication system. For oil-lubricated pumps, orientation may affect lubrication, whereas magnetically levitated pumps are less sensitive. The manufacturer's installation guidelines should always be followed.
What vacuum level can a turbomolecular pump achieve?General reference — not yet source-verified
Turbomolecular pumps are capable of achieving high to ultra-high vacuum levels, making them suitable for applications that require very low pressures. The exact ultimate pressure depends on the pump design, bakeout conditions, and the quality of the vacuum system, but these pumps are commonly used to reach pressures in the range required for electron microscopy and surface science.
Not publicly documented
The following facts about the TPU 510 Turbomolecular Vacuum are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TPU 510 Turbomolecular Vacuum are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the TPU 510 Turbomolecular Vacuum are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the TPU 510 Turbomolecular Vacuum are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the TPU 510 Turbomolecular Vacuum is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the TPU 510 Turbomolecular Vacuum are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Last updated Oct 10, 2026.
Compare with similar tools
View all →
The Applied Materials 0010-13627 is a high efficiency RF match designed for semiconductor equipment.