Pfeiffer

DUO 20 M Vacuum

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The Pfeiffer DUO 20 M Vacuum is a dual-stage rotary vane vacuum pump. The Pfeiffer DUO 20 M Vacuum is used for rough and medium vacuum applications. The Pfeiffer DUO 20 M Vacuum is specified with pumping speed up to 24 m3/h at 60 Hz.^[1]^[2]

DUO 20 M Vacuum — Inventory photo — Fig. 01DUO 20 M VacuumInventory photo^[3]

Power

20 m3/h^[1]

Vacuum

Pump needs complete overhaul^[3]

Gas delivery

Yes^[1]

How it works

A rotary vane pump uses a rotating mechanism with vanes to move gas from the inlet side toward the exhaust side while compressing it inside the pump housing. The DUO 20 M is a dual-stage rotary vane pump.^[5]^[1]^[2]

Where it fits in the process flow

The DUO 20 M is positioned for low and medium vacuum service. The DUO 20 M can be connected on the vacuum side and exhaust side with DN 25 ISO-KF flanges.^[1]^[2]^[5]

Applications

The DUO 20 M is intended for low and medium vacuum applications. The DUO 20 M is suitable for pumping service that uses gas ballast and operating fluid management to handle typical rotary-vane pump duty.^[1]^[2]^[5]

Why won't it start?

Documented failure modes, common issues, and field considerations.

Pump needs complete overhaul

What do the numbers mean?

Power & electrical7

Pumping speed at 50 Hz: 20 m3/h^[1]2 sources
Pumping speed at 60 Hz: 24 m3/h^[1]2 sources
Rated power 50 Hz: 0.75 kW^[1]
Rated power 60 Hz: 0.90 kW^[1]
Rotation speed at 50 Hz: 1500 min-1^[1]
Rotation speed at 60 Hz: 1800 min-1^[1]
Voltage: 100-110 V at 50 Hz; 100-120 V at 60 Hz^[1]

Vacuum & pumping6

Pump needs complete overhaul^[3]
Pump type: Dual-stage, high-performance rotary vane pump^[1]
Applications: Low and medium vacuum applications^[1]
Ultimate pressure with gas ballast: 4 × 10^-3 hPa^[1]
Ultimate pressure without gas ballast: 2 × 10^-3 hPa^[1]
Pump type: Dual-stage rotary vane pump^[1]

Gas & chemistry1

Integrated gas ballast: Yes^[1]

Dimensions & facilities3

Mass: 42.5 kg^[4]
Weight: 44 kg^[1]
Weight: 39 kg^[2]

Configuration & options12

Oil: P3^[3]
Max flow: 24.0 m³/h^[3]
Speed: 1800 1/min^[3]
Flange (in): DN 25 ISO-KF^[1]
Flange (out): DN 25 ISO-KF^[1]
Operating fluid: P3^[1]
Operating fluid filling: 1.1 l^[1]
Inlet flange: DN 25 ISO-KF^[1]
Outlet flange: DN 25 ISO-KF^[1]
Magnetic coupling: Yes^[1]
HV safety valve: Integrated^[2]
Motor type: 1-phase motor^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
DUO 20 MC	—	—	C version with operating fluid F4, encapsulated magnetic coupling on the pump side, changed vane material, and hose connection on the gas ballast valve.	avac.com^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationPump needs complete overhaul^[3]
Pump typeDual-stage, high-performance rotary vane pump^[1]
ApplicationsLow and medium vacuum applications^[1]
Pumping speed at 50 Hz20 m3/h^[1]
Pumping speed at 60 Hz24 m3/h^[1]
Rated power 50 Hz0.75 kW^[1]
Rated power 60 Hz0.90 kW^[1]
Rotation speed at 50 Hz1500 min-1^[1]
Rotation speed at 60 Hz1800 min-1^[1]
Ultimate pressure with gas ballast4 × 10^-3 hPa^[1]
Ultimate pressure without gas ballast2 × 10^-3 hPa^[1]
Pump typeDual-stage rotary vane pump^[1]
Integrated gas ballastYes^[1]
Voltage100-110 V at 50 Hz; 100-120 V at 60 Hz^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of pump is the DUO 20 M?

The DUO 20 M is a dual-stage rotary vane pump.^[1]^[2]

What vacuum range is the DUO 20 M intended for?

The DUO 20 M is intended for low and medium vacuum applications.^[1]^[2]

What pumping speed is given for the DUO 20 M?

The DUO 20 M has a pumping speed of 20 m3/h at 50 Hz and 24 m3/h at 60 Hz.^[1]^[2]

What ultimate pressure is given for the DUO 20 M?

The DUO 20 M has an ultimate pressure of 4 · 10-3 hPa with gas ballast and 2 · 10-3 hPa without gas ballast.^[1]^[2]

Not publicly documented

The following facts about the DUO 20 M Vacuum are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DUO 20 M Vacuum are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the DUO 20 M Vacuum are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the DUO 20 M Vacuum is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the DUO 20 M Vacuum are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the DUO 20 M Vacuum are on record.
Answerable by: university cleanroom staff or an OEM application specialist

Sources & citations

Sources (5)Every fact above is drawn from these public sources

[1]avac.com — avac.comavac.com
[2]highvacdepot.com — highvacdepot.comhighvacdepot.com
[3]Inventory photo
[4]waferpedia.comwaferpedia.com
[5]https://www.idealvac.com/files/brochures/Pfeiffer_Duo20M_Operation_Instructions.pdf — idealvac.comidealvac.com