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Optorun

OTFC 1100

Optorun OTFC 1100 family
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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Optorun OTFC 1100 is a coater. The Optorun OTFC 1100 was modified from an NBPF 1 unit. The Optorun OTFC 1100 had its high-speed substrate holder changed to a dome-type substrate holder.[1][2][3]

OTFC 1100 — Inventory photo
Fig. 01OTFC 1100Inventory photo[1]

What it is

The Optorun OTFC 1100 is a coater.[1][2][3]

How it works

The Optorun OTFC 1100 includes a high-speed substrate holder that was changed to a dome-type substrate holder.[1][2][3]

The Optorun OTFC 1100 includes an optical monitor changed for visible wavelength.[1][2][3]

Applications

The Optorun OTFC 1100 is connected to visible-wavelength optical monitoring and a dome-type substrate holder.[1][2][3]

What do the numbers mean?

Wafer handling2

Modified the high-speed substrate holder to dome type substrate holder[1]
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Modification
High-speed substrate holder changed to dome type substrate holder[1]
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Optics & imaging2

Changed the optical monitor for visible wavelength[1]
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Optics change
Optical monitor changed for visible wavelength[1]
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Configuration & options3

NBPF 1 Modified to OTFC 1100[1]
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Equipment type
Coater[1]
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Base unit
NBPF 1[1]
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Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
NBPF 1——Modified to OTFC 1100; the high-speed substrate holder was changed to a dome-type substrate holder and the optical monitor was changed for visible wavelength.Equipment inventory listing[1]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the Optorun OTFC 1100?

The Optorun OTFC 1100 is a coater.[1][2][3]

What earlier unit is the OTFC 1100 associated with?

The Optorun OTFC 1100 is modified from an NBPF 1 unit.[1][2][3]

Not publicly documented

The following facts about the OTFC 1100 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the OTFC 1100 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the OTFC 1100 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the OTFC 1100 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the OTFC 1100 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the OTFC 1100 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Optorun OTFC 1100 family | Waferpedia — waferpedia.comwaferpedia.com
  3. [3]OTFC 1100 — Optorun | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 11, 2026.

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