Onto Innovation
RPM 2000 PL Mapper
Wafer size
2"
Optics
785nm and almost new 532nm lasers[2]
What it is
General reference — not yet source-verifiedThe Onto Innovation RPM 2000 PL Mapper is a semiconductor metrology and inspection tool.
How it works
The RPM 2000 PL Mapper can use laser excitation, white light for thickness measurements, and detector channels suited to a broad sensitivity range.[2]
Where it fits in the process flow
General reference — not yet source-verifiedA PL mapper is used in wafer characterization rather than in pattern transfer or material deposition.
Applications
General reference — not yet source-verifiedPL mapping is used for compound semiconductor and optoelectronic wafer inspection where spatial variation in luminescence and thickness is relevant.
What do the numbers mean?
Wafer handling4
Optics & imaging4
Configuration & options5
- White light source for thickness, VCSEL, DBR measurements[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the RPM 2000 PL Mapper are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the RPM 2000 PL Mapper are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the RPM 2000 PL Mapper are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the RPM 2000 PL Mapper are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the RPM 2000 PL Mapper are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the RPM 2000 PL Mapper is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]inventory listing
Last updated Oct 8, 2026.
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