Onto Innovation
NSX 115
The NSX 115 is an inspection system. The NSX 115 is an automated optical inspection machine. The NSX 115 is designed for non-contact inspection of semiconductor wafers.[1]
What it is
How it works
The NSX 115 AOI is configured as a single-phase system with 200-240 VAC, 50/60 Hz power.[4]
Applications
The NSX 115 AOI is used for semiconductor wafer inspection.[1]
The NSX 115 AOI is used in front-end semiconductor processes and back-end semiconductor processes.[1]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Damaged or shortage items listed: robot, stage assembly, Odyssey board, computer assembly, and power supply assembly.
What do the numbers mean?
Power & electrical3
Wafer handling1
- Robot[2]
Optics & imaging1
Control & software1
- Computer assy[2]
Configuration & options9
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| NSX 115 AOI | — | — | Described as an automated optical inspection machine and listed with power and configuration specifications. | waferpedia.com[4] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the NSX 115?
It is an inspection system.[2]
Not publicly documented
The following facts about the NSX 115 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSX 115 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the NSX 115 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the NSX 115 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the NSX 115 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the NSX 115 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]slideserve.com — slideserve.comslideserve.com
- [2]Inventory photo
- [3]waferpedia.com — waferpedia.comwaferpedia.com
- [4]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 6, 2026.
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