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Onto Innovation

MetaPulse 200 C Film Thickness Measurement

MetaPulse 200 C Film Thickness Measurement — Inventory photo
Fig. 01MetaPulse 200 C Film Thickness MeasurementInventory photo[1]

What it is

The Onto Innovation MetaPulse 200 C is a film thickness measurement system designed for 8-inch wafers.[1][2]

How it works

General reference — not yet source-verified

Film thickness measurement systems typically operate by directing a probe beam onto the wafer surface and analyzing the reflected or transmitted signal. The interaction of the beam with the film stack yields information about layer thickness, often through interference patterns or time-of-flight analysis.

For the MetaPulse product line, the measurement principle is generally based on picosecond ultrasonics, where a short laser pulse generates acoustic waves that propagate through the film stack; the reflected echoes are detected to determine layer thickness.

Where it fits in the process flow

General reference — not yet source-verified

In the semiconductor fabrication process flow, film thickness measurement tools are typically used after deposition steps such as chemical vapor deposition (CVD), physical vapor deposition (PVD), or atomic layer deposition (ALD). Measurement data is fed back to adjust deposition parameters, ensuring that film thicknesses stay within specification before subsequent patterning or etching steps.

Applications

The system is used for film thickness measurement of thin films on semiconductor wafers.[2]

What do the numbers mean?

Power & electrical5

Voltage
220 VAC[1]
Accurate?
Single Phase[2]
Accurate?
50/60 Hz[1]
Accurate?
Maximum Single Load
5 amps at 220 VAC[2]
Accurate?
Frequency
50/60 Hz[2]
Accurate?

Wafer handling2

Wafer size
8 inch[1]
Accurate?
Wafer size
8-inch wafers[2]
Accurate?

Configuration & options5

4900 va[1]
Accurate?
16 Fla[1]
Accurate?
Power
220 VAC[2]
Accurate?
Apparent power
4900 va[2]
Accurate?
Full load current
16 Fla[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage220 VAC[1]
  • ConfigurationSingle Phase[2]
  • Configuration50/60 Hz[1]
  • Maximum Single Load5 amps at 220 VAC[2]
  • Frequency50/60 Hz[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the MetaPulse 200 C used for?

It is used for film thickness measurement.[1]

Not publicly documented

The following facts about the MetaPulse 200 C Film Thickness Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MetaPulse 200 C Film Thickness Measurement are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the MetaPulse 200 C Film Thickness Measurement are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the MetaPulse 200 C Film Thickness Measurement are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the MetaPulse 200 C Film Thickness Measurement are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the MetaPulse 200 C Film Thickness Measurement is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 11, 2026.

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