Onto Innovation

Atlas Metrology

Metrology & Inspection Onto Innovation Atlas Metrology family

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Onto InnovationAtlas Metrology

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What it is

The Atlas is a metrology system manufactured by Onto Innovation, which was formerly Nanometrics.^[1]^[2]

How it works

General reference — not yet source-verified

Metrology systems of this class employ non-contact optical techniques, typically spectroscopic ellipsometry or reflectometry, to determine thin-film thicknesses, refractive indices, and optical constants of films deposited on semiconductor substrates.

The tool directs a beam of polarized light onto the wafer surface and analyzes the change in polarization state upon reflection, enabling precise measurement of film stacks with multiple layers.

Where it fits in the process flow

General reference — not yet source-verified

The Atlas is positioned in the metrology step of the semiconductor fabrication process, where wafers are measured after key deposition or etch operations to verify that film thicknesses and optical properties meet process specifications.

Results from the tool feed back into process control loops, allowing adjustments to deposition tools or lithography conditions to maintain yield and device performance.

Applications

General reference — not yet source-verified

The system is applied to measurement of dielectric films, photoresist layers, anti-reflective coatings, and multilayer stacks in front-end and back-end process flows.

What do the numbers mean?

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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the Atlas Metrology are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No specifications for the Atlas Metrology are on record.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Atlas Metrology are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Atlas Metrology are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Atlas Metrology are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Atlas Metrology are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician