OAI
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Mask aligners are photolithography tools used to transfer patterns from a photomask onto a photosensitive substrate, typically a semiconductor wafer. Mask aligners operate by bringing a mask into proximity or contact with the substrate and exposing it to ultraviolet (UV) light.
A mask aligner typically contains a UV light source, a collimation optical system, a mask holder, a substrate chuck with alignment stages, and an exposure controller. The operator loads a substrate, aligns the mask relative to the substrate using manual or semi-automatic controls, and then exposes the photoresist-coated substrate to a controlled dose of UV light through the mask.
The OAI Model 200, as a tabletop mask aligner, is designed for manual or semi-automatic operation in a compact footprint. The system incorporates proven industrial components to achieve reliable exposure results.
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The OAI Model 200 is a tabletop mask aligner.[1]
The following facts about the Model 200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the Model 200 are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Model 200 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Model 200 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Model 200 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Model 200 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
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Last updated Oct 9, 2026.
Brooks 017-0146-01 is a prealigner manufactured by Brooks.
The EVG 101 is an advanced resist processing system for spin or spray coating and developing of wafers up to 300 mm.