Nordson

Stratosphere Plasma Treatment

Wafer kit sensor Nordson Stratosphere Plasma Treatment family

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NordsonStratosphere Plasma Treatment

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Wafer size

Wafer kit sensor

Power

Assy, Chiller, 1HP, 230V/60, 1/4"^[1]

Vacuum

16 CFM standard dry pump^[1]

Gas delivery

100 sccm MFC^[1]

What it is

The Nordson Stratosphere Plasma Treatment System is a plasma treatment tool for semiconductor manufacturing. The model is part of the Stratosphere plasma treatment family.^[2]^[3]

What do the numbers mean?

Power & electrical5

Parallel plate asher - able to use RF power supply between 600 to 1000W^[1]; Assy, Chiller, 1HP, 230V/60, 1/4"^[1]; RF Generator^[1]
RF power range: 600 to 1000 W^[1]
Chiller: Assy, Chiller, 1HP, 230V/60, 1/4"^[1]

Vacuum & pumping2

16 CFM standard dry pump^[1]
Vacuum: 16 CFM standard dry pump^[1]

Wafer handling4

Wafer size: Wafer kit sensor^[1]
Wafer size: Wafer kit, 200/300mm hybrid^[1]
Wafer handling: Wafer kit sensor^[3]
Wafer size kit: Wafer kit, 200/300mm hybrid^[1]

Gas & chemistry2

100 sccm MFC^[1]
Gas delivery: 100 sccm MFC^[1]

Configuration & options16

E-FEM, 300mm FOUP (2), ESD^[1]; Chamber base^[1]; Tuning network^[1]; E-FEM safety cover^[1]; Integration Kit, Plasma Module (1)^[1]; Non-PCR Lit^[1]; Heated capacitance manometer^[1]; Electrode water cooling^[1]; F 3 electrode temperature sensor^[1]
Manufacturer: Nordson^[1]
Model: Stratosphere^[1]
Tool family: Nordson Stratosphere Plasma Treatment^[2]
Equipment type: Plasma Treatment System^[1]
Process type: Parallel plate asher^[1]
Electrode water cooling: Included^[1]
Electrode temperature sensor: F 3 electrode temperature sensor^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationParallel plate asher - able to use RF power supply between 600 to 1000W^[1]
ConfigurationAssy, Chiller, 1HP, 230V/60, 1/4"^[1]
ConfigurationRF Generator^[1]
Configuration16 CFM standard dry pump^[1]
Configuration100 sccm MFC^[1]
RF power range600 to 1000 W^[1]
ChillerAssy, Chiller, 1HP, 230V/60, 1/4"^[1]
Vacuum16 CFM standard dry pump^[1]
Gas delivery100 sccm MFC^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What process does the Nordson Stratosphere Plasma Treatment System support?

The system supports surface preparation and contamination removal for ashing, descum, bump, organic contamination removal, and wafer destress.^[4]

Not publicly documented

The following facts about the Stratosphere Plasma Treatment are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Stratosphere Plasma Treatment are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Stratosphere Plasma Treatment are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Stratosphere Plasma Treatment are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Stratosphere Plasma Treatment are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Stratosphere Plasma Treatment is not on record.
Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources

[1]inventory listing
[2]waferpedia.com — waferpedia.comwaferpedia.com
[3]waferpedia.com — waferpedia.comwaferpedia.com
[4]Nordson MARCH StratoSPHERE Plasma Treatment System Expands Up to 6 Chambers for Increased Throughput and Flexibility — smtnet.comsmtnet.com