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Nikon

NSR S 205 C

LithographyNikon NSR family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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What it is

The Nikon NSR S 205 C is a semiconductor lithography scanner.[1]

The NSR-S205C is Nikon's fifth-generation KrF scanner.[2]

How it works

The NSR-S205C uses a four-to-one reduction system with a 25 mm x 33 mm exposure field.[2]

The NSR-S205C uses a projection lens with 0.75 numerical aperture.[2]

Where it fits in the process flow

The NSR-S205C is intended for production use.[2]

Applications

General reference — not yet source-verified

A lithography scanner is used to print semiconductor device patterns on wafers for downstream device fabrication.

What do the numbers mean?

Wafer handling3

Throughput (200 mm)
140-200 wafers per hour[2]
Accurate?
Throughput (300 mm)
84 wafers per hour[2]
Accurate?
Wafer Sizes Supported
200 mm and 300 mm (field-upgradable)[2]
Accurate?

Optics & imaging4

Wavelength
248 nm (KrF)[1]
Accurate?
Numerical Aperture
0.75[2]
Accurate?
Overlay Accuracy
< 30 nm[2]
Accurate?
Exposure Field
25 mm × 33 mm[2]
Accurate?

Configuration & options4

248nm (KrF)[1]
Accurate?
Type
Scanner[1]
Accurate?
Minimum Feature Size
0.13 µm[2]
Accurate?
Reduction Ratio
4:1[2]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the Nikon NSR S 205 C?

It is a Nikon scanner for semiconductor manufacturing.[1]

Not publicly documented

The following facts about the NSR S 205 C are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR S 205 C are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NSR S 205 C are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NSR S 205 C are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NSR S 205 C are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the NSR S 205 C is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]web.archive.org — nikonprecision.com (Aug 13, 2003)web.archive.org
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Last updated Sep 28, 2026.

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