Laurell
WS-650-23 B Spin
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Laurell WS-650-23 B is a compact 650-series spin coater that accommodates up to 150 mm wafers and 5"×5" (127 mm×127 mm) substrates. The Laurell WS-650-23 B achieves a maximum rotational speed of 12,000 RPM when processing a 100 mm silicon wafer. The Laurell WS-650-23 B supports a variety of processes including coating, etching, developing, rinsing-drying, and cleaning.[1][2]
What it is
How it works
Where it fits in the process flow
The WS-650-23B is intended for coating, etching, developing, rinsing-drying, and cleaning.[1]
Applications
What do the numbers mean?
Power & electrical1
Vacuum & pumping3
- Vacuum Requirements
- 25–28 inHg (635–711 mm Hg) with flow 4.5 SCFM (0.127 m³/min) at 0 inHg[1]
- Nitrogen Purge Pressure
- 60–70 PSIG (4–5 bar) of N₂ or CDA; consumption 3 ft³/h (0.085 m³/h) for standard motor, 20 ft³/h (0.566 m³/h) for high-performance motor[1]
- Safety Certifications
- ETL, UL, CSA, CE, RoHS compliant; door interlock, vacuum interlock, lid interlock[1]
Wafer handling2
Gas & chemistry1
- Housing Material
- Solid co-polymer blend (proprietary); optional PTFE (Hostaflon TFM-1600 / Teflon AF) for high-temperature chemistry[1]
Control & software1
- Process Controller
- 650-series microprocessor controller with PC software support (Spin 3000); real-time interaction, pausing, stopping, and continuation[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Power Requirements95 to 240 VAC, 47/63 Hz, ~300 W[1]
- Vacuum Requirements25–28 inHg (635–711 mm Hg) with flow 4.5 SCFM (0.127 m³/min) at 0 inHg[1]
- Nitrogen Purge Pressure60–70 PSIG (4–5 bar) of N₂ or CDA; consumption 3 ft³/h (0.085 m³/h) for standard motor, 20 ft³/h (0.566 m³/h) for high-performance motor[1]
- Housing MaterialSolid co-polymer blend (proprietary); optional PTFE (Hostaflon TFM-1600 / Teflon AF) for high-temperature chemistry[1]
- Safety CertificationsETL, UL, CSA, CE, RoHS compliant; door interlock, vacuum interlock, lid interlock[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What substrate sizes can the WS-650-23B handle?
The WS-650-23B accommodates wafers up to 150 mm and substrates up to 5 inch by 5 inch.[1][2]
What is the maximum rotational speed of the WS-650-23B?
The WS-650-23B has a maximum rotational speed of 12,000 RPM based on a 100 mm silicon wafer.[1][2]
Which process types are supported on the WS-650-23B?
The WS-650-23B is intended for coating, etching, developing, rinsing-drying, and cleaning.[1]
Not publicly documented
The following facts about the WS-650-23 B Spin are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WS-650-23 B Spin are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the WS-650-23 B Spin are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the WS-650-23 B Spin are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the WS-650-23 B Spin are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the WS-650-23 B Spin is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]laurell.com — laurell.comlaurell.com
- [2]WS-650-23B Spin Coater — premier-sols.compremier-sols.com
- [3]Inventory photo
Last updated Oct 9, 2026.