Lam Research
Gasonics Vector SOLA
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Lam / Novellus / Gasonics Vector SOLA is a plasma-enhanced chemical vapor deposition (PECVD) system. The Vector SOLA processes 12-inch wafers. The Vector SOLA includes a UV cure capability.[1][2][3]
What it is
General reference — not yet source-verifiedPECVD systems deposit thin films of dielectric or semiconductor materials onto wafers by introducing reactive gases into a vacuum chamber and igniting a plasma. The plasma lowers the deposition temperature compared to conventional thermal CVD, enabling film formation at temperatures compatible with underlying device structures.
Applications
General reference — not yet source-verifiedOther applications include the deposition of passivation layers, protective coatings, and hard masks for subsequent etch processes. The system supports both conventional and advanced materials required for logic, memory, and other semiconductor devices.
What do the numbers mean?
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Applied Materials Producer SE— Same function class: Deposition, nullCompare in depthsource[1]
- Applied Materials P 5000 Mark II DLH— Same function class: Deposition, nullCompare in depthsource[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Process TypePECVD (Plasma-Enhanced Chemical Vapor Deposition)[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What kinds of films are made with deposition equipment?General reference — not yet source-verified
Machines of this class can be used for insulating, conductive, barrier, passivation, and other functional films depending on the process.
Why is process control important in deposition?General reference — not yet source-verified
Because film thickness, coverage, adhesion, and uniformity depend on stable control of the process environment and material delivery.
Is deposition a patterning or removal step?General reference — not yet source-verified
No. Deposition adds material, while patterning and removal are separate process classes.
Not publicly documented
The following facts about the Gasonics Vector SOLA are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Gasonics Vector SOLA are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Gasonics Vector SOLA are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Gasonics Vector SOLA are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Gasonics Vector SOLA are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Gasonics Vector SOLA is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]Equipment inventory listing
- [3]Equipment inventory listing
Last updated Sep 28, 2026.
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