Lam Research
Gasonics Vector
What it is
What do the numbers mean?
Power & electrical4
- Low Frequency RF Generator[1]
- High Frequency RF Generator[1]
- RF Match[1]
- Additional configuration
- 2x FOUP Loadports; Mini-Environment (Front End); Atmospheric Robot; User Interface: screen & computer; Light Tower; 2x Loadlocks; 2x Loadlock Cooling Pedestals; 2x Linear Transfer Modules; 4x Showerheads; Al Heater Pedestals with lift pins (station 1); Al Heater Pedestals (stations 2-4); Pneumatic Spindle; Integrated Liquid Delivery System (not on this particular configuration); Low Frequency RF Generator; High Frequency RF Generator; RF Match; Endpoint Controller; Gas Box; Local Power Box; 3x Super Input / Output Controller; Motion Controller; Module Controller[1]
Wafer handling4
Gas & chemistry2
- Gas Box[1]
Control & software4
Configuration & options15
- SiN Oxide[2]
- UV Cure[3]
- 2x FOUP Loadports[1]
- Mini-Environment (Front End)[1]
- Light Tower[1]
- Al Heater Pedestals with lift pins (station 1)[1]
- Al Heater Pedestals (stations 2-4)[1]
- Pneumatic Spindle[1]
- Integrated Liquid Delivery System (not on this particular configuration)[1]
- Local Power Box[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationLow Frequency RF Generator[1]
- ConfigurationHigh Frequency RF Generator[1]
- ConfigurationRF Match[1]
- ConfigurationGas Box[1]
- Equipment typePECVD (Plasma-Enhanced Chemical Vapor Deposition)[2]
- Additional configuration2x FOUP Loadports; Mini-Environment (Front End); Atmospheric Robot; User Interface: screen & computer; Light Tower; 2x Loadlocks; 2x Loadlock Cooling Pedestals; 2x Linear Transfer Modules; 4x Showerheads; Al Heater Pedestals with lift pins (station 1); Al Heater Pedestals (stations 2-4); Pneumatic Spindle; Integrated Liquid Delivery System (not on this particular configuration); Low Frequency RF Generator; High Frequency RF Generator; RF Match; Endpoint Controller; Gas Box; Local Power Box; 3x Super Input / Output Controller; Motion Controller; Module Controller[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Gasonics Vector are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Gasonics Vector are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Gasonics Vector are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Gasonics Vector are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Gasonics Vector are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Gasonics Vector is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]inventory listing
- [3]inventory listing
- [4]Equipment inventory listing
Last updated Oct 4, 2026.
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