KLA

UV 1050 Thin Film Measurement

Research Quality: 40% complete

The KLA UV 1050 is a thin film measurement system used for measuring thin films on 8-inch wafers. The KLA UV 1050 is classified as legacy equipment.^[1]

UV 1050 Thin Film Measurement — Inventory photo — Fig. 01UV 1050 Thin Film MeasurementInventory photo^[2]

Plate 01KLA-Tencor Prometrix UV-1050 Thin Film Measurement System (ID# 4308)
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What it is

The KLA UV 1050 is a model of thin film measurement system manufactured by KLA. One configuration of the UV 1050 accepts wafers of 8 inch diameter.^[1]

Why won't it start?

Documented failure modes, common issues, and field considerations.

Focus adjustments are taking longer than expected.
A solenoid for the field illumination shutter was fitted, but could not be connected electronically and requires a specific Molex connector.

What do the numbers mean?

Wafer handling2

Wafer Size: 8 inch^[1]
Wafer Sizes: 8 inch^[1]

Optics & imaging2

Replaced objective rotation PCB^[7]

Accurate?

New solenoid for field illumination shutter fitted, but cannot connect electronically, requires specific molex connector^[7]

Accurate?

Control & software1

PCIF PCB and Turret Control PCB fitted from 1050-2 X,Y,Z stage PM^[3]

Accurate?

Dimensions & facilities1

Power and CDA is blue LOTO'd^[7]

Accurate?

Configuration & options14

Cognex communciation verified^[3]; New lamp fitted and began setup^[3]; Focus adjustments are taking longer than expected^[3]; Lamp change completed^[7]; Replaced old lamp wiring harness^[7]; Turret Servo Drive PCB fitted^[7]
Phase: 1 Phase^[8]
OEM: KLA^[9]
Model: UV 1050^[9]
Asset Number: 141686^[9]
Asset Number: 128717^[2]
Asset Number: 128175^[3]
Asset Number: 128174^[7]
Asset Number: 83945^[1]

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the equipment type?

The KLA UV 1050 is a thin film measurement system.^[9]^[2]^[3]^[7]^[1]

Not publicly documented

The following facts about the UV 1050 Thin Film Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the UV 1050 Thin Film Measurement are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the UV 1050 Thin Film Measurement are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the UV 1050 Thin Film Measurement are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the UV 1050 Thin Film Measurement is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the UV 1050 Thin Film Measurement are on record.
Answerable by: an OEM parts catalog or a service engineer