KLA
Surfscan SP 1 DLS
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The KLA-Tencor Surfscan SP1 DLS is an unpatterned surface inspection system. The SP1 DLS detects, counts, and bins defects on polished wafers, epi wafers, and engineered substrates. The SP1 DLS offers 0.050 micrometer defect sensitivity on polished bare silicon and uses an argon ion laser at 488nm.[1][2]
Wafer size
For Wafer Centering Device
Optics
Argon Ion Laser (488 nm)[1]
How it works
The Surfscan SP 1 DLS uses a 488 nm argon-ion laser as its illumination source. The laser beam is scanned across the wafer surface, and scattered light from defects is collected by photomultiplier tubes. The system achieves a defect sensitivity of 0.050 µm on polished bare silicon, as tested with polystyrene sphere (PSL) reference wafers.[1][5]
What do the numbers mean?
Wafer handling4
Optics & imaging1
Control & software1
Configuration & options13
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the Surfscan SP1 DLS support?
The system is currently configured for 200 mm and 300 mm wafers, and it includes a 300 mm single FOUP/FIMS handler.[1]
What is the defect sensitivity of the Surfscan SP1 DLS?
The specified defect sensitivity is 0.050 µm on polished bare silicon.[1]
What type of laser does the Surfscan SP1 DLS use?
The system uses an argon ion laser with a wavelength of 488 nm.[1]
Does the Surfscan SP1 DLS have defect classification?
Yes, it includes Real Time Defect Classification (RTDC) capability.[1]
Not publicly documented
The following facts about the Surfscan SP 1 DLS are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan SP 1 DLS are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Surfscan SP 1 DLS are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Surfscan SP 1 DLS are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Surfscan SP 1 DLS are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Surfscan SP 1 DLS is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]classoneequipment.com — classoneequipment.comclassoneequipment.com
- [2]KLA Tencor | Substrate — kla-tencor.com (May 21, 2009)web.archive.org
- [3]Inventory photo
- [4]Equipment inventory listing
- [5]KLA-Tencor Surfscan SP 1 DLS Unpatterened Surface Inspection 12 | SemiStar — semistarcorp.comsemistarcorp.com
- [6]KLA-Tencor | Products | Browse | Data Storage — tencor.com (Jul 27, 2003)web.archive.org
Last updated Sep 22, 2026.
Compare with similar tools
View all →
The ABM-407B-2-S-CE-S293 is a robot.
The Tokyo Semitsu Kogaku (TSK) UF200 is a production wafer prober configured for 200mm wafers.