KLA
ICOS CI T 130 Lead
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
General reference — not yet source-verifiedA lithography scanner exposes a patterned optical image onto a photosensitive layer so the pattern can be transferred to the wafer surface.
A scanner in this class typically aligns the wafer to the reticle pattern, controls exposure placement, and supports repeated pattern transfer across many sites on a substrate.
Where it fits in the process flow
General reference — not yet source-verifiedA lithography scanner sits in the patterning stage of semiconductor manufacturing, before etch and other pattern-transfer steps.
A lithography scanner follows wafer preparation and resist coating, and it precedes development and downstream transfer operations.
Applications
General reference — not yet source-verifiedA lithography scanner is used for defining circuit patterns on wafers in integrated-circuit fabrication.
A lithography scanner is used wherever repeated, controlled optical patterning is required on a photosensitive wafer surface.
What do the numbers mean?
No specifications recorded yet
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Where are the manuals?
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Not publicly documented
Field notes
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Not publicly documented
The following facts about the ICOS CI T 130 Lead are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No specifications for the ICOS CI T 130 Lead are on record.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ICOS CI T 130 Lead are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the ICOS CI T 130 Lead are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the ICOS CI T 130 Lead are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the ICOS CI T 130 Lead are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]ICOS CI T 130 Lead — KLA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 6, 2026.
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