Waferpedia

KLA

HRP 340 Thickness Measurement

Metrology & InspectionKLA HRP 340 family
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HRP 340 Thickness Measurement — Inventory photo
Fig. 01HRP 340 Thickness MeasurementInventory photo[1]

What it is

The KLA HRP 340 Thickness Measurement is a metrology and inspection tool for wafer thickness measurement.[2][3]

The KLA HRP 340 Thickness Measurement belongs to the KLA HRP 340 family.[3]

How it works

General reference — not yet source-verified

A wafer thickness measurement tool measures the thickness of a semiconductor wafer as part of metrology and inspection.

A thickness measurement tool is used to quantify wafer geometry and process condition rather than to modify the wafer surface.

Where it fits in the process flow

The KLA HRP 340 Thickness Measurement supports wafer characterization on 12-inch wafers.[1][2][3]

Applications

The KLA HRP 340 Thickness Measurement is used for wafer thickness measurement.[2][3]

The KLA HRP 340 Thickness Measurement is used on 12-inch wafers.[1][2][3]

What do the numbers mean?

Power & electrical4

50/60 Hz[1]
Accurate?
230 Volts[1]
Accurate?
Power frequency
50/60 Hz[1]
Accurate?
Voltage
230 Volts[1]
Accurate?

Wafer handling1

Wafer size
12 inch[1]
Accurate?

Configuration & options2

Phase
1 Phase / 3 Wires[1]
Accurate?
Phase / wiring
1 Phase / 3 Wires[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration50/60 Hz[1]
  • Configuration230 Volts[1]
  • Power frequency50/60 Hz[1]
  • Voltage230 Volts[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What kind of equipment is the KLA HRP 340 Thickness Measurement?

The KLA HRP 340 Thickness Measurement is a metrology and inspection tool for wafer thickness measurement.[2][3]

What family does the KLA HRP 340 Thickness Measurement belong to?

The KLA HRP 340 Thickness Measurement belongs to the KLA HRP 340 family.[3]

Not publicly documented

The following facts about the HRP 340 Thickness Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the HRP 340 Thickness Measurement are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the HRP 340 Thickness Measurement are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the HRP 340 Thickness Measurement are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the HRP 340 Thickness Measurement are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the HRP 340 Thickness Measurement is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]HRP 340 Thickness Measurement — KLA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
  3. [3]KLA HRP 340 family | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 4, 2026.

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