KLA
Candela CS 20 V Surface Analyzer
The KLA Candela CS 20 V Surface Analyzer is a non‑destructive, laser‑based surface inspection and metrology system. The Candela CS 20 V uses a 405 nm violet laser (25 mW) to measure film thickness, detect particles as small as 0.08 µm, and identify surface defects such as scratches, pits, bumps, and stains. The Candela CS 20 V handles wafers from 2 to 8 inches and provides vertical topography resolution of 1 Å.[1][2]
What it is
The KLA Candela CS 20 V is a violet laser (405 nm, 25 mW) surface analyzer that handles wafer sizes from 2 to 8 inches.[1][2]
The KLA Candela CS 20 V operates as a fully automated system with cassette-to-cassette wafer handling, a robotic wafer handler, and dual cassette configuration for pass/fail binning.[2]
How it works
The Candela CS 20 V employs detection modes including scattered light, specular reflection, phase shift, and surface topography mapping.[1]
The optical system uses a 405 nm, 25 mW diode laser with a spot size of 5 × 6 µm, and the topography measurement achieves a vertical resolution of 1 Å.[1]
The KLA Candela CS 20 V maintains an internal class 10 cleanroom environment and includes a standard CAS document and installation/site preparation documentation.[2]
Where it fits in the process flow
General reference — not yet source-verifiedSurface analyzers of this type also serve for incoming wafer quality control, process monitoring, and final verification of polished or deposited thin films.
Applications
The Candela CS 20 V is applied to defect detection, film thickness uniformity analysis, particle detection, and surface topography measurement including micro-roughness and waviness.[1]
The system detects scratches (minimum length 100 µm, width 0.1 µm, depth 50 Å), pits/bumps (minimum diameter 20 µm, depth 50 Å), and stains (minimum diameter 20 µm, film thickness 10 Å).[1]
Particle detection capability reaches down to 0.08 µm (PSL equivalent) with ≥95% detection rate on polished wafers.[1]
The KLA Candela CS 20 V is suitable for semiconductor and related optoelectronic materials, including Si, GaAs, Ge, and substrates such as GaAs-on-GaAs and GaAs-on-Ge.[2]
What do the numbers mean?
Power & electrical1
Wafer handling8
Optics & imaging6
Control & software1
Dimensions & facilities6
Configuration & options11
- Particle Detection:[1]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Candela CS 20 V | — | — | — | Equipment inventory listing[5] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Power supply230 VAC 50/60 Hz[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the KLA Candela CS 20 V handle?
The KLA Candela CS 20 V handles 2 inch, 3 inch, 4 inch, 5 inch, 6 inch, and 8 inch wafers.[1]
What inspection tasks does the KLA Candela CS 20 V perform?
The KLA Candela CS 20 V performs film thickness uniformity analysis, particle detection, surface defect detection, and surface topography measurement.[1]
What kinds of surface defects does the KLA Candela CS 20 V detect?
The KLA Candela CS 20 V detects scratches, stains, pits, and bumps.[1]
What optical detection modes does the KLA Candela CS 20 V use?
The KLA Candela CS 20 V uses scattered light, specular reflection, phase shift, and surface topography detection modes.[1]
What laser is used in the KLA Candela CS 20 V?
The KLA Candela CS 20 V uses a 405 nm, 25 mW diode laser.[1]
Not publicly documented
The following facts about the Candela CS 20 V Surface Analyzer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Candela CS 20 V Surface Analyzer are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Candela CS 20 V Surface Analyzer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Candela CS 20 V Surface Analyzer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Candela CS 20 V Surface Analyzer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Candela CS 20 V Surface Analyzer are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]semistarcorp.com — semistarcorp.comsemistarcorp.com
- [3]Inventory photo
- [4]Inventory photo
- [5]inventory listing
Last updated Sep 28, 2026.
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