KLA
Candela 8520 Wafer
Wafer size
Wafer Thickness 350μm ~ 1100μm
Power
50/60 Hz[1]
Vacuum
100 psi / 689 KPa (± 10% range)[2]
Optics
The Candela 85 XX uses two lasers[2]
What it is
How it works
The KLA Candela 8520 Wafer supports wafer mapping with a micro optical sensor and SECS-GEM interfaces.[2]
Where it fits in the process flow
General reference — not yet source-verifiedWafer inspection equipment belongs in the inspection and metrology portion of semiconductor manufacturing.
Wafer inspection systems are used after process steps that create films, surfaces, or structures, and they provide feedback before later fabrication steps continue.
Applications
What do the numbers mean?
Power & electrical11
Vacuum & pumping3
Wafer handling11
- SiC Sub; SiC Epi (T); Adjustable UI; 6" Ring Chuck; Aluminum 2-8" EE; 150mm Cassette Locator[1]
Optics & imaging6
Control & software2
- SECS-GEM Interfaces[2]
Dimensions & facilities1
Configuration & options11
- 20 A[1]
- 3 Wire[2]
- AMC
- maximum concentration of Volatile Organic Compounds (VOC) must be less than 150 ng/l.[2]
- Anions must be less than 14 ng/l. Cations must be less than 10 ng/l.[2]
- Moisture Content
- less than 20 PPM at 1.0 atm, corresponding to a dewpoint of -30° Celsius (-22°F).[2]
- SiC Sub; SiC Epi (T)[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Configuration50/60 Hz[1]
- Voltage208 VAC[1]
- ConfigurationSingle Phase[1]
- Voltage230 V[2]
- Configuration20 amps[2]
- CDA Pressure100 psi / 689 KPa (± 10% range)[2]
- Vacuum Pressure-680 mm Hg / -90 KPa (± 10% range).[2]
- Power230 V[2]
- Electrical phase1 Phase[2]
- Electrical wiring3 Wire[2]
- Current20 amps[2]
- Frequency50/60 Hz[2]
- Vacuum flow0.64 SCFM / 18 L/min (± 10% range)[2]
- Electrical1 Phase, 3 Wire, 230 V, 20 amps, 50/60 Hz[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Candela 8520 Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Candela 8520 Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Candela 8520 Wafer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Candela 8520 Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Candela 8520 Wafer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Candela 8520 Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Equipment inventory listing
Last updated Oct 10, 2026.
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