KLA
Archer 200 Overlay
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
The Archer 200 uses optical imaging to measure overlay and support layer-to-layer alignment control.[1][3]
The Archer 200 uses AIM alignment targets and is compatible with micro-AIM targets for denser placement within the chip.[1][3]
The Archer 200 can be equipped with an optional SCOL module for scatterometry-based overlay measurement.[1][3]
The Archer 200 uses redesigned optics, a modified light path, and camera management algorithms to improve throughput, matching, and measurement repeatability.[1]
Where it fits in the process flow
The Archer 200 supports scanner alignment and scanner correction through higher-order overlay control.[1]
Applications
What do the numbers mean?
Vintage & configurations
- 2008-06-05introduced[1]
KLA-Tencor introduced the Archer 200 on June 5, 2008.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What model is it?
It is the KLA Archer 200.[2]
Not publicly documented
The following facts about the Archer 200 Overlay are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the Archer 200 Overlay are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Archer 200 Overlay are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Archer 200 Overlay are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Archer 200 Overlay is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Archer 200 Overlay are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]ir.kla.com — ir.kla.comir.kla.com
- [2]inventory listing
- [3]KLA Tencor announces Archer 200 overlay metrology system | Semiconductor Digest — sst.semiconductor-digest.comsst.semiconductor-digest.com
Last updated Oct 10, 2026.
Compare with similar tools
View all →The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA .498 PSL Wafer is a NIST traceable reference wafer.
