KLA
5200
The KLA 5200 is an overlay metrology system. The KLA 5200 uses Coherence Probe Microscopy (CPM), a patented white-light interferometric technique. The KLA 5200 can measure feature sizes down to .18 µm.[1]
What it is
How it works
The KLA 5200 uses Coherence Probe Microscopy, a white-light interferometric technique that identifies surfaces rather than only edges.[1]
The KLA 5200 includes built-in analysis software and a graphical user interface for production operation, in-line process qualification, and off-line engineering analysis.[1]
Where it fits in the process flow
The KLA 5200 supports chipmakers in tightening process specifications, improving process control, and reducing lithography-related delay in product introduction.[1]
Applications
The KLA 5200 is used for overlay metrology for advanced lithography.[1]
The KLA 5200 is intended for measuring all layers, including low-contrast or grainy targets.[1]
- Overlay metrology for advanced lithography
- In-line process qualification
- Off-line engineering analysis
What do the numbers mean?
Performance1
Control & software2
Configuration & options5
- Measurement technology
- Coherence Probe Microscopy (CPM), a patented white-light interferometric technique[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the KLA 5200?
The KLA 5200 is a comprehensive overlay metrology system.[1]
What measurement method does the KLA 5200 use?
The KLA 5200 uses Coherence Probe Microscopy, a patented white-light interferometric technique.[1]
What does the KLA 5200 measure?
The KLA 5200 measures surfaces and can measure all layers, including low-contrast or grainy targets.[1]
What software features are part of the KLA 5200?
The KLA 5200 includes built-in analysis software and a graphical user interface.[1]
Not publicly documented
The following facts about the 5200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 5200 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 5200 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 5200 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 5200 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 5200 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]dealer listingwotol.com
Last updated Oct 10, 2026.
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