KLA

5100 XP Overlay Measurement

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The KLA 5100 XP Overlay Measurement System is an overlay measurement system for 8-inch wafers. The KLA 5100 XP runs software version 14.70.01 and uses a KLA Internal robot with an x3 Open Cassette handler.^[1]^[2]

5100 XP Overlay Measurement — Inventory photo — Fig. 015100 XP Overlay MeasurementInventory photo^[1]

What it is

The KLA 5100 XP is an overlay measurement system belonging to KLA's 5100 family. The system is configured for 8-inch wafers.^[1]^[2]^[3]^[4]^[5]^[6]

What do the numbers mean?

Wafer handling3

Robot Type: KLA Internal^[1]
Handler: x3 Open Cassette^[1]
Wafer Size: 8 inch^[1]

Control & software1

Software Version: 14.70.01^[1]

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What wafer size does the KLA 5100 XP support?

The KLA 5100 XP supports 8-inch wafers.^[1]^[2]

What software version is installed on the KLA 5100 XP?

The KLA 5100 XP runs software version 14.70.01.^[1]^[2]

What robot type is used in the KLA 5100 XP?

The KLA 5100 XP uses a KLA Internal robot.^[1]^[2]

What handler configuration does the KLA 5100 XP feature?

The KLA 5100 XP is equipped with an x3 Open Cassette handler.^[1]^[2]

To which product family does the KLA 5100 XP belong?

The KLA 5100 XP belongs to the KLA 5100 family.^[3]^[5]

Not publicly documented

The following facts about the 5100 XP Overlay Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 5100 XP Overlay Measurement are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 5100 XP Overlay Measurement are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 5100 XP Overlay Measurement are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 5100 XP Overlay Measurement are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 5100 XP Overlay Measurement is not on record.
Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (6)Every fact above is drawn from these public sources

[1]Inventory photo
[2]5100 XP Overlay Measurement — KLA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
[3]KLA 5100 XP Overlay Measurement vs KLA P 10 comparison | Waferpedia — waferpedia.comwaferpedia.com
[4]KLA 5100 XP Overlay Measurement vs KLA INS 3000 DUV Defect comparison | Waferpedia — waferpedia.comwaferpedia.com
[5]KLA 5100 XP Overlay Measurement vs KLA 5200 comparison | Waferpedia — waferpedia.comwaferpedia.com
[6]KLA 5100 XP Overlay Measurement vs KLA P 15 XP Surface comparison | Waferpedia — waferpedia.comwaferpedia.com