KLA
5100 Overlay Measurement
What it is
How it works
Where it fits in the process flow
Applications
What do the numbers mean?
Wafer handling1
- Dual SMIF Cassette loader, 200mm[1]
Optics & imaging3
Control & software1
- Windows NT / VAX software[1]
Configuration & options3
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer size does the KLA 5100 Overlay Measurement System use?
The KLA 5100 Overlay Measurement System uses 8-inch wafers.[2][1]
What measurement range is given for the KLA 5100?
The KLA 5100 measures steps from 100 Å to 300 µm.[3]
What sample handling features are given for the KLA 5100?
The KLA 5100 has a 200 mm sample table with vacuum, a maximum sample thickness of 20 mm, and a minimum sample length of 25 mm.[3]
Not publicly documented
The following facts about the 5100 Overlay Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 5100 Overlay Measurement are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 5100 Overlay Measurement are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 5100 Overlay Measurement are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 5100 Overlay Measurement are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 5100 Overlay Measurement is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]KLA 5100 family | Waferpedia — waferpedia.comwaferpedia.com
- [3]KLA 5100 Overlay Measurement vs KLA P-15 | Waferpedia — waferpedia.comwaferpedia.com
Last updated Sep 26, 2026.
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