Waferpedia

KLA

4PP-TypeB

KLA 4PP-TypeB family
Research Quality: 50% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

KLA 4PP-TypeB is a four-point probe product. KLA 4PP-TypeB is listed on KLA Instruments' online store.[1]

4PP-TypeB — store.kla-instruments.com
Fig. 014PP-TypeBstore.kla-instruments.com[1]

What it is

The KLA 4PP-TypeB is a four-point probe used for sheet resistance measurement.[2][3]

The KLA 4PP-TypeB is a probe accessory in the KLA thin-film measurement product line.[1][2]

How it works

The 4PP-TypeB has 1 mm spacing, a 100 um tip radius, and a 100 gm probe force.[2][3]

The 4PP-TypeB is intended for general purpose implantation measurement.[2][3]

Where it fits in the process flow

The 4PP-TypeB is used with Filmetrics R50 and R54 4PP measurement systems.[2]

Applications

The 4PP-TypeB is used for general purpose implantation measurement.[2][3]

What do the numbers mean?

Dimensions & facilities1

Weight
100 gm[2]
Accurate?

Configuration & options9

product type
Four-point probe[1]3 sources
Accurate?
Probe spacing
1 mm[2]
Accurate?
Tip radius
100 µm[2]
Accurate?
Application
general purpose implantation measurement[2]
Accurate?
Compatible systems
Filmetrics R50 / R54 4PP measurement systems[2]
Accurate?
Tip radius
100um[2]
Accurate?
Compatible measurement systems
Filmetrics R50 / R54 4PP measurement systems[2]
Accurate?
Spacing
1mm[2]
Accurate?
Force
100gm[2]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
4PP-TypeA———store.kla-instruments.com[1]
4PP-TypeC———store.kla-instruments.com[1]
4PP-TypeD———store.kla-instruments.com[1]
4PP-TypeE———store.kla-instruments.com[1]
4PP-TypeF———store.kla-instruments.com[1]
4PP-TypeG———store.kla-instruments.com[1]
4PP-TypeH———store.kla-instruments.com[1]
4PP-TypeI———store.kla-instruments.com[1]
Interested in this tool?
Need help with this tool?Embed spec card

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What does the KLA 4PP-TypeB measure?

The KLA 4PP-TypeB measures sheet resistance.[3][2]

What are the probe geometry details of the KLA 4PP-TypeB?

The KLA 4PP-TypeB has 1 mm spacing, a 100 µm tip radius, and 100 g force.[3][2]

What measurement systems is the KLA 4PP-TypeB used with?

The KLA 4PP-TypeB is used with Filmetrics R50 and R54 4PP measurement systems.[2]

Not publicly documented

The following facts about the 4PP-TypeB are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 4PP-TypeB are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the 4PP-TypeB are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 4PP-TypeB are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 4PP-TypeB is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 4PP-TypeB are on record.

    Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]store.kla-instruments.com — store.kla-instruments.comstore.kla-instruments.com
  2. [2]store.kla-instruments.com — store.kla-instruments.comstore.kla-instruments.com
  3. [3]4PP-TypeB - CN Tech — cntech.co.ukcntech.co.uk
  4. [4]4PP-TypeA — KLA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Was this page accurate?

Last updated Oct 7, 2026.

Compare with similar tools

View all →