Waferpedia

KLA

2138 Brightfield

Metrology & InspectionKLA 21xx family
Research Quality: 50% complete
2138 Brightfield — Inventory photo
Fig. 012138 BrightfieldInventory photo[1]

What it is

General reference — not yet source-verified

The KLA 2138 Brightfield is a semiconductor wafer inspection system that uses brightfield optical microscopy to detect defects on wafer surfaces.

How it works

General reference — not yet source-verified

Brightfield inspection illuminates the wafer surface with a broad-spectrum or laser light source and collects the reflected light through an optical microscope. Defects such as particles, scratches, or pattern anomalies scatter or absorb light, creating contrast in the captured image that is analyzed by digital image processing algorithms.

Applications

General reference — not yet source-verified

The system is applied to detect yield-relevant defects on all process layers, including front-end-of-line and back-end-of-line structures, for advanced semiconductor manufacturing.

What do the numbers mean?

Power & electrical3

50/60 Hz[1]
Accurate?
Voltage
208 V, 3 Phase[1]
Accurate?
Frequency
50/60 Hz[1]
Accurate?

Wafer handling3

Robot Type
KLA Internal[1]
Accurate?
Wafer Size
8 inch[1]
Accurate?
Wafer Size (Version)
200 mm[6]
Accurate?

Control & software1

Software Version
5.4.010[1]
Accurate?

Configuration & options3

30 A[1]
Accurate?
Current
30 A[1]
Accurate?
Vintage
1997[1]
Accurate?
Interested in this tool?
Need help with this tool?Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration50/60 Hz[1]
  • Voltage208 V, 3 Phase[1]
  • Frequency50/60 Hz[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What wafer size does the KLA 2138 Brightfield handle?

The KLA 2138 Brightfield handles 8-inch (200 mm) wafers.[7][1][8]

What are the electrical power requirements?

The system requires 208 V, 3-phase, 50/60 Hz power and is rated for 30 A.[1][8][9][10]

What robot type is used for wafer handling?

The KLA 2138 Brightfield uses a KLA Internal robot type.[1][8][9][10]

Not publicly documented

The following facts about the 2138 Brightfield are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2138 Brightfield are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 2138 Brightfield are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 2138 Brightfield are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 2138 Brightfield are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 2138 Brightfield is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (10)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]fabsurplus.comfabsurplus.com
  7. [7]Equipment inventory listing
  8. [8]2138 Brightfield — KLA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
  9. [9]KLA 2135 vs KLA 2138 Brightfield comparison | Waferpedia — waferpedia.comwaferpedia.com
  10. [10]KLA 2138 Brightfield vs KLA 2350 comparison | Waferpedia — waferpedia.comwaferpedia.com
Was this page accurate?

Last updated Oct 10, 2026.

Compare with similar tools

View all →