Hitachi
TM 3030 Plus
The Hitachi TM 3030 Plus is a desktop scanning electron microscope. The Hitachi TM 3030 Plus is equipped with a premium SE detector. The Hitachi TM 3030 Plus is capable of quick SE image observation without specimen preparation.[1][2]
What it is
The Hitachi TM 3030 Plus is a desktop scanning electron microscope used for metrology and inspection.[5][2]
The TM 3030 Plus is a tabletop electron microscope that supports secondary electron imaging and backscattered electron imaging.[2][3]
How it works
Where it fits in the process flow
The TM 3030 Plus is used for observing samples quickly, including samples that can be placed directly on the stage for surface and compositional analysis.[3]
Applications
What do the numbers mean?
Vintage & configurations
- 2014-08Production start[3]
TM3030Plus released in August 2014.
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Operating voltages5 kV, 15 kV[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the TM 3030 Plus are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the TM 3030 Plus are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the TM 3030 Plus are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the TM 3030 Plus are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the TM 3030 Plus is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the TM 3030 Plus are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]smif.pratt.duke.edu — smif.pratt.duke.edusmif.pratt.duke.edu
- [3]unicam.hu — unicam.huunicam.hu
- [4]emerge-infrastructure.euemerge-infrastructure.eu
- [5]TM 3030 Plus — Hitachi | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 11, 2026.
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