Hitachi
S 9380
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Hitachi S 9380 is a scanning electron microscope (SEM) used in semiconductor manufacturing for metrology and inspection.[1]
How it works
An auto-focus mechanism and high-speed image transfer capability enable rapid automated measurement sequences.[2]
Where it fits in the process flow
General reference — not yet source-verifiedThe S 9380 is a metrology tool used in semiconductor fabrication to measure critical dimensions on patterned wafers after various process steps such as lithography and etch.
Measurements from the CD-SEM are fed back to adjust process parameters, improving yield and process control.
What do the numbers mean?
Power & electrical4
- Single Phase[1]
Wafer handling1
Control & software1
Configuration & options3
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| S-9380II | — | — | — | web.archive.org[2] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the Hitachi S 9380?
It is a scanning electron microscope.[1]
Not publicly documented
The following facts about the S 9380 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 9380 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the S 9380 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S 9380 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S 9380 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the S 9380 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]web.archive.org — hitachi-hightech.com (Oct 20, 2016)web.archive.org
Last updated Sep 29, 2026.
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