Hitachi
S 3700 N
What it is
The Hitachi S 3700 N is a scanning electron microscope (SEM) used for metrology and inspection of semiconductor wafers and other samples. The model is categorized as an ultra large variable-pressure SEM (VP-SEM) by the manufacturer. The S 3700 N handles wafer sizes up to 12 inches.[1][2]
Where it fits in the process flow
General reference — not yet source-verifiedIn a fab process flow, the SEM sits in the inspection and metrology segment, typically after a process step that generates features requiring verification. Upstream steps include deposition, lithography, or etch; results feed back into process control and yield management. Downstream, defective wafers may be reworked or scrapped based on the inspection data.
What do the numbers mean?
Vacuum & pumping2
- One-button selectable High Vacuum / Low Vacuum modes[1]
Wafer handling1
Control & software2
- 5-axis computer eucentric motorized stage with -20/+90* tilt[1]
Dimensions & facilities1
Configuration & options8
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the maximum wafer size the Hitachi S 3700 N can handle?
The Hitachi S 3700 N handles wafer sizes up to 12 inches.[1]
What are the vacuum mode options on the S 3700 N?
The S 3700 N provides one-button selectable High Vacuum and Low Vacuum modes.[1]
What is the observable area diameter of the S 3700 N?
The observable area is up to 203 mm in diameter.[1]
What type of stage does the S 3700 N have?
The S 3700 N has a 5-axis computer eucentric motorized stage with a tilt range of -20 to +90 degrees.[1]
Not publicly documented
The following facts about the S 3700 N are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 3700 N are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S 3700 N are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S 3700 N are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S 3700 N are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S 3700 N is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]web.archive.org — hitachi-hightech.com (May 20, 2022)web.archive.org
Last updated Oct 2, 2026.
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