Waferpedia

Hitachi

LS 9200 T Surface Particle Measurement

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Hitachi LS 9200 T is a surface particle measurement system. The Hitachi LS 9200 T supports 12-inch wafers. The Hitachi LS 9200 T operates at 100 V, 50/60 Hz, single phase, 5 kVA.[1]

LS 9200 T Surface Particle Measurement — Inventory photo
Fig. 01LS 9200 T Surface Particle MeasurementInventory photo[1]

What is it?

The Hitachi LS 9200 T is a surface particle measurement system supporting 12-inch wafers and operating at 100 V, 50/60 Hz, single phase, 5 kVA.

What do the numbers mean?

Power & electrical3

Voltage
100 V[1]
Accurate?
Frequency
50/60 Hz[1]
Accurate?
Phase
Single Phase[1]
Accurate?

Wafer handling1

Wafer size
12 inch[1]
Accurate?

Configuration & options2

Power
5 kVA[1]
Accurate?
Vintage
2013[1]
Accurate?

Observed configurations

How individual machines were equipped when they appeared on the secondary market — as listed, per unit. These describe one specific machine, not the model in general.

Unit as listed[1]

  • 100 V line voltage
  • 12 inch wafer size
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage100 V[1]
  • Frequency50/60 Hz[1]
  • PhaseSingle Phase[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the LS 9200 T Surface Particle Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the LS 9200 T Surface Particle Measurement are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the LS 9200 T Surface Particle Measurement are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the LS 9200 T Surface Particle Measurement are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the LS 9200 T Surface Particle Measurement are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the LS 9200 T Surface Particle Measurement is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Sep 24, 2026.

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