Edwards

IGX 1000 N

Q: What type of pump is the Edwards IGX 1000 N?

The Edwards IGX 1000 N is a dry pump.

Research Quality: 30% complete

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EdwardsIGX 1000 N

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Power

1.6 kW^[1]

Vacuum

800 m³/h (471 CFM)^[1]

What it is

The Edwards IGX 1000 N is a dry vacuum pump.^[3]^[4]^[2]^[1]

Where it fits in the process flow

The Edwards IGX 1000 N fits in vacuum generation for semiconductor tools and related vacuum systems.^[2]^[1]

What do the numbers mean?

Power & electrical2

Power at ultimate (700 Torr exhaust): 1.6 kW^[1]
AUC (Active Utility Controller) power: 1.05 kW^[1]

Vacuum & pumping4

Pumping speed: 800 m³/h (471 CFM)^[1]
Ultimate pressure: 1.00×10⁻⁴ mbar (7.5×10⁻⁴ Torr)^[1]
Exhaust connection: NW25 (KF25)^[1]
Footprint (excluding exhaust): 0.20 m²^[1]

Dimensions & facilities2

Weight: 230 kg (507 lbs)^[1]
Cooling water flow: 2 slm^[1]

Configuration & options4

Inlet connection: ISO100^[2]
Motor power: 2.1 hp^[1]
Nitrogen purge flow: 4 or 14 slm^[1]
Noise at ultimate: < 55 dB(A)^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
iGX1000N 200-230V 50/60 Hz	—	—	200-230V, 50/60 Hz input voltage	ptbsales.com^[1]
iGX1000N 380-460V 50/60 Hz	—	—	380-460V, 50/60 Hz input voltage	ptbsales.com^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Pumping speed800 m³/h (471 CFM)^[1]
Ultimate pressure1.00×10⁻⁴ mbar (7.5×10⁻⁴ Torr)^[1]
Exhaust connectionNW25 (KF25)^[1]
Power at ultimate (700 Torr exhaust)1.6 kW^[1]
AUC (Active Utility Controller) power1.05 kW^[1]
Footprint (excluding exhaust)0.20 m²^[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of pump is the Edwards IGX 1000 N?

The Edwards IGX 1000 N is a dry pump.^[3]^[4]^[2]^[1]

Not publicly documented

The following facts about the IGX 1000 N are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IGX 1000 N are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the IGX 1000 N are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the IGX 1000 N are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the IGX 1000 N is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the IGX 1000 N are on record.
Answerable by: an OEM parts catalog or a service engineer