Edwards
IGX 100 M
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Edwards iGX 100 M is a dry vacuum pump from Edwards' iGX series. The Edwards iGX 100 M delivers a peak pumping speed of 62 CFM and achieves an ultimate pressure of 3.75 mtorr. The Edwards iGX 100 M features Ethernet connectivity for remote monitoring and is available in 200–230V and 380–460V voltage variants.[1][2]
What it is
Where it fits in the process flow
Applications
The IGX 100 M is used with process categories that include load lock, transfer, metrology, lithography, PVD, PVD pre-clean, RTA, strip and ashing, oxide etch, silicon etch, metal etch, and implant source work.[4]
What do the numbers mean?
Power & electrical6
Vacuum & pumping3
Dimensions & facilities1
Configuration & options5
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| iGX100M 200–230V | — | — | Voltage variant: 200–230 V, 50/60 Hz, part number A54612958 | idealvac.com[1] |
| iGX100M 380–460V | — | — | Voltage variant: 380–460 V, 50/60 Hz, part number A54612959 | idealvac.com[1] |
| iGX100M SS | — | — | Stainless steel construction, 200–230 V, 50/60 Hz, part number A53612958 | ptbsales.com[2] |
| iGX100MTI | — | — | Ti variant (specific differences not stated), 200–230 V, 50/60 Hz, part number A54648958 | idealvac.com[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Peak pumping speed105 m³/h (62 cfm, 1750 l/min)[2]
- Ultimate pressure5.00E-03 mbar (3.75E-03 Torr, 0.50 Pa)[2]
- Power at 700 Torr exhaust1 kW[2]
- AUC (Active Utility Control) power0.05 kW[2]
- Footprint (excluding exhaust)0.20 m²[2]
- Input voltage options200–230 V and 380–460 V, 50/60 Hz, 3-phase[1]
- Part number (200–230 V)A54612958[1]
- Part number (380–460 V)A54612959[1]
- SS variant part number (200–230 V)A53612958[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of pump is the Edwards IGX 100 M?
The Edwards IGX 100 M is a dry vacuum pump for semiconductor use.[3][4][6]
What process areas is the IGX 100 M used for?
The IGX 100 M is used for load lock, transfer, metrology, lithography, PVD, PVD pre-clean, RTA, strip and ashing, oxide etch, silicon etch, metal etch, and implant source applications.[4]
Not publicly documented
The following facts about the IGX 100 M are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IGX 100 M are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the IGX 100 M are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the IGX 100 M are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the IGX 100 M is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the IGX 100 M are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]idealvac.com — idealvac.comidealvac.com
- [2]ptbsales.com — ptbsales.comptbsales.com
- [3]Inventory photo
- [4]Edwards IGX 100m Dry Pump | Rebuilt | Provac Sales — provac.comprovac.com
- [5]Edwards iGX100M Manuals | ManualsLib — manualslib.commanualslib.com
- [6]iGX100M Edwards NR5150000XS Dry Pump IGX 100 M SS Manufacturer Refurbi – Semiconductor Spares Store — semiconductorspares.comsemiconductorspares.com
Last updated Sep 24, 2026.